FCON – Model cube MFC compact mass flow controller & measurement
Mass Flow Control/Measurement Unit
CUBE MFC
Features:
Compact and lightweight integral unit. Easy flow measuring and controlling
Flow rate display: Display (SET / OUT selector switch)
Output voltage (0 5 VDC) output terminal is at the back of the unit as standard set up.
Upon request, Calibration certificate, Calibration report, and Traceability scheme can be prepared with additional charges.
1000 series has a flow rate accuracy of ± 1% F.S. Can be supported.
Specification:
Model | Controller | CUBE MFC 10051020 1030 1050 1100 | ||
Model | Meter | CUBE MFM 1005102010301050 1100 | ||
Mass Flow Controller (*1) | 1000 series | |||
Flow range | 10 SCCM 100 SLM | |||
Operating temperature | 5 | 50 | Accuracy guaranteed between 15 35 85 RH No condensation permitted | |
Standard fitting | 1/4in.SWL (equivalent), One- For other fitting, please contact us. | |||
Setting signal/Mass flow control | 0.25 5 VDC 10-turn potentiometer | |||
Output signal | 0 5 VDC | |||
Flow rate setting / output display | 0 100 (*2) | |||
Display switching (setting / output) | Toggle Switch | |||
Output terminal | Setting signal/Output signal : 0 5 VDC | |||
Input power | AC100-240 V |
*1. Mass flow controller is conform to 1000 series specification.
*2. Flow rate display setting changes is possible.
Dimension:
Ordering:
CUBE MFC 1005 4S2 1L N2
Series | Fitting | Full scale (*1) |
1005 10 SCCM 5 SLM | 4S2 1/4in.SWL(equivalent) | 50 50 SCCM |
1020 10 20 SLM | KQ2 One-touch fittings | 5L 5 SLM |
1030 30 SLM |
Gas Type(*2) N2 Air O2 H2 He CO2 etc. |
|
1050 50 SLM | ||
1100 100 SLM |
*1. At FCON, flow rates (SCCM, SLM) are converted to values at 0 , 101.3kPa abs (1atm) for calibration.
Please specify separately if you wish to calibrate at 20 or 25 .
*2. Gas type is an example; please contact us for other gases.
FCON – Model 1000 digital mass flow controller
Economical Mass Flow Controller
1000 Series
Features:
It is an analog model specializing the basic functions of the mass flow controller.
Suppression of Flow surge (overshoot) at the start (Requires more than 30 seconds of interval).
Analog (0 5VDC)
separate control power supply and a signal cable are required.
Upon request, Calibration certificate, Calibration report, and Traceability scheme can be prepared with additional charges.
1000 series has a flow rate accuracy of ± 1% F.S. Can be supported.
Specification:
Mass Flow Controller | C1005 | C1020 | C1030/C1050 | C1100 |
Mass Flow Meter | M1005 | M1020 | M1030/M1050 | – |
Flow range (N2 equivalent) |
10,20,30,50 SCCM
100,200,300,500 SCCM 1,2,3,5 SLM |
10,20 SLM |
30,50 SLM |
100 SLM |
Gases |
Various Gases (Please consult with us about corrosive
gas) |
Air N2 Ar H2 CO2
O2 He |
Air N2 |
|
Valve type | Normally Open (Excluding Mass Flow Meter) | |||
Flow rate control range | 5-100 F.S (Excluding Mass Flow Meter) | |||
Accuracy | ±2 F.S (Accuracy guaranteed between 15-35) | |||
Setting signal | 0.25-5VDC (Excluding Mass Flow Meter) | |||
Output signal | 0-5VDC | |||
Repeatability | ±0.2 F.S. | ±0.5 F.S. | ||
Response speed | 6 sec | 15 sec | ||
Operating differential pressure | 50-300 kPa | 200-300 kPa | ||
Pressure Resistance | 1 MPa(G) | |||
Operating temperature | 5 50 Accuracy guaranteed between 15 35 85 RH No condensation permitted | |||
Leak Integrity | 1×10-7Pa m3/sec He | |||
Mounting attitude | Not Specified (Free) | |||
Drive power source | +15VDC 60mA -15VDC 150mA | |||
Communication | Analog 0-5 VDC | |||
Wetted surface material | SUS316 PTFE Fluoro-Rubber | |||
Seal material | Fluoro-Rubber | |||
Actuator system | Thermal (Excluding Mass Flow Meter) | |||
Surface Finishing | Machined finish | |||
Standard fittings | 1/4in.SWL (equivalent), One- For other fitting, please contact us. |
Dimension:
Ordering:
C 1005 4S2 5L N2
1 Type
C Controller
M Meter
2 Series
1005 10 SCCM 5 SLM
1020 10 20 SLM
1030 30 SLM
1050 50 SLM
1100 100 SLM
3 Fitting
4S2 1/4in.SWL(equivalent)
6S2 3/8in.SWL(equivalent)
KQ2 One-touch fittings
4 Full scale (*2)
50L 50 SCCM
5L 5 SLM
5 Full scale (*3)
N2 Air O2 H2 He
CO2 etc.
*1. For other fitting, please contact us.
*2. At FCON, flow rates (SCCM, SLM) are converted to values at 0 , 101.3kPa abs (1atm) for calibration.
Please specify separately if you wish to calibrate at 20 or 25 .
*3. Gas type is an example; please contact us for other gases.
Signal cable:
When purchasing the mass flow controller, it is possible for us to produce signal cables and replacement cables for the power supply control currently in use. In the situation whereby the shape of the signal cable connector from the equipment is different, if the information of the connector shape and pin assignment is available, we can manufacture the signal cables in addition to the standard products. Depending on the type of connector, it may be difficult to manufacture. Please feel free to contact us for more details.
FCON – Model 2000 digital mass flow controller with display
Digital Mass Flow Controller
With Built-in Display
2000 series
Features:
-in display setting unit, setting control is possible only with the main unit.
V single power supply (500mA or more AC adapter can be used). realize small size and space saving.
Simple installation to various equipment.
-5V and 4-20mA can be switched. accumulation function.
Digital Control Application Software.
Upon request, Calibration certificate, Calibration report, and Traceability scheme can be prepared with additional charges.
Specification:
Mass Flow Controller | C2005 | C2020 | |
Mass Flow Meter | M2005 | M2020 | |
Flow range (N2 equivalent) | 10 SCCM 5SLM | 10 SLM | 20 SLM |
Gases | Air, nitrogen, carbon dioxide, argon, hydrogen, helium, oxygen | ||
Valve type | Normally Closed (Excluding Mass Flow Meter) | ||
Flow rate control range | 2-100 F.S. (Excluding Mass Flow Meter) | ||
Accuracy | ±1 F.S. (Accuracy guaranteed between 15-35) | ||
Setting signal | Setting section of main unit, Digital: RS485, Analog: 0-5V and 4.3-20mA can be switched
(Excluding Mass Flow Meter) |
||
Output signal | Main unit display: 7-segment LED, Digital: RS485, Analog: 0-5V and 4-20mA can be switched | ||
Repeatability | ±0.2 F.S. | ||
Response speed | 2sec | ||
Operating differential pressure | 50-300 kPa | 100-300 kPa | 200-300kPa |
Pressure resistance | 1 MPa(G) | ||
Operating temperature | 5 50 Accuracy guaranteed between 15 35 85RH No condensation permitted | ||
Leak integrity | 1×10-7Pa m3/sec He | ||
Mounting attitude | Not Specified (Free) | ||
Drive power source | +24VDC 500mA | ||
Communication | RS485, Analog: 0-5V and 4-20mAcan be switched | ||
Wetted surface material | SUS316, PTFE, Fluoro-Rubber | ||
Seal material | Fluoro-Rubber | ||
Actuator system | Solenoid (Excluding Mass Flow Meter) | ||
Surface finishing | Machined finish | ||
Standard fitting | 1/4in.SWL (equivalent) For other fitting, please contact us. |
Dimension:
Ordering:
C 2005 4S2 1L N2
1 Type
C Controller
M Meter
2 Series
2005 10 SCCM 5 SLM
2020 10SLM, 20 SLM
1030 30 SLM
1050 50 SLM
1100 100 SLM
3 Fittings
4S2 1/4in.SWL(equivalent)
KQ2 One-touch fittings
4 Full scale (*2)
50 50 SCCM
5L 5 SLM
10L 10 SLM
5 Type of Gas (*3)
N2 Air O2 H2 He
CO2 etc.
*1. For other fitting, please contact us.
*2. At FCON, flow rates (SCCM, SLM) are converted to values at 0 , 101.3kPa abs (1atm) for calibration.
Please specify separately if you wish to calibrate at 20 or 25 .
*3. Gas type is an example; please contact us for other gases.
Signal cable:
AC adapter for C2000 +24 VDC DC22.8 25.2 V 500 mAand above recommend.
C2000 RS485 Communication Conversion Unit with Digital Control Application Software.
C2000 RJ11 RJ11Communication Cable
Analog Communication Cable.
Please feel free to contact us for more details.
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