Economical Mass Flow Controller
1000 Series
Features:
It is an analog model specializing the basic functions of the mass flow controller.
Suppression of Flow surge (overshoot) at the start (Requires more than 30 seconds of interval).
Analog (0 5VDC)
separate control power supply and a signal cable are required.
Upon request, Calibration certificate, Calibration report, and Traceability scheme can be prepared with additional charges.
1000 series has a flow rate accuracy of ± 1% F.S. Can be supported.
Specification:
| Mass Flow Controller | C1005 | C1020 | C1030/C1050 | C1100 |
| Mass Flow Meter | M1005 | M1020 | M1030/M1050 | – |
|
Flow range (N2 equivalent) |
10,20,30,50 SCCM
100,200,300,500 SCCM 1,2,3,5 SLM |
10,20 SLM |
30,50 SLM |
100 SLM |
|
Gases |
Various Gases (Please consult with us about corrosive
gas) |
Air N2 Ar H2 CO2
O2 He |
Air N2 |
|
| Valve type | Normally Open (Excluding Mass Flow Meter) | |||
| Flow rate control range | 5-100 F.S (Excluding Mass Flow Meter) | |||
| Accuracy | ±2 F.S (Accuracy guaranteed between 15-35) | |||
| Setting signal | 0.25-5VDC (Excluding Mass Flow Meter) | |||
| Output signal | 0-5VDC | |||
| Repeatability | ±0.2 F.S. | ±0.5 F.S. | ||
| Response speed | 6 sec | 15 sec | ||
| Operating differential pressure | 50-300 kPa | 200-300 kPa | ||
| Pressure Resistance | 1 MPa(G) | |||
| Operating temperature | 5 50 Accuracy guaranteed between 15 35 85 RH No condensation permitted | |||
| Leak Integrity | 1×10-7Pa m3/sec He | |||
| Mounting attitude | Not Specified (Free) | |||
| Drive power source | +15VDC 60mA -15VDC 150mA | |||
| Communication | Analog 0-5 VDC | |||
| Wetted surface material | SUS316 PTFE Fluoro-Rubber | |||
| Seal material | Fluoro-Rubber | |||
| Actuator system | Thermal (Excluding Mass Flow Meter) | |||
| Surface Finishing | Machined finish | |||
| Standard fittings | 1/4in.SWL (equivalent), One- For other fitting, please contact us. | |||
Dimension:
Ordering:
C 1005 4S2 5L N2
1 Type
C Controller
M Meter
2 Series
1005 10 SCCM 5 SLM
1020 10 20 SLM
1030 30 SLM
1050 50 SLM
1100 100 SLM
3 Fitting
4S2 1/4in.SWL(equivalent)
6S2 3/8in.SWL(equivalent)
KQ2 One-touch fittings
4 Full scale (*2)
50L 50 SCCM
5L 5 SLM
5 Full scale (*3)
N2 Air O2 H2 He
CO2 etc.
*1. For other fitting, please contact us.
*2. At FCON, flow rates (SCCM, SLM) are converted to values at 0 , 101.3kPa abs (1atm) for calibration.
Please specify separately if you wish to calibrate at 20 or 25 .
*3. Gas type is an example; please contact us for other gases.
Signal cable:
When purchasing the mass flow controller, it is possible for us to produce signal cables and replacement cables for the power supply control currently in use. In the situation whereby the shape of the signal cable connector from the equipment is different, if the information of the connector shape and pin assignment is available, we can manufacture the signal cables in addition to the standard products. Depending on the type of connector, it may be difficult to manufacture. Please feel free to contact us for more details.
รีวิว
ยังไม่มีบทวิจารณ์