Mass Flow Control/Measurement Unit
CUBE MFC
Features:
Compact and lightweight integral unit. Easy flow measuring and controlling
Flow rate display: Display (SET / OUT selector switch)
Output voltage (0 5 VDC) output terminal is at the back of the unit as standard set up.
Upon request, Calibration certificate, Calibration report, and Traceability scheme can be prepared with additional charges.
1000 series has a flow rate accuracy of ± 1% F.S. Can be supported.
Specification:
| Model | Controller | CUBE MFC 10051020 1030 1050 1100 | ||
| Model | Meter | CUBE MFM 1005102010301050 1100 | ||
| Mass Flow Controller (*1) | 1000 series | |||
| Flow range | 10 SCCM 100 SLM | |||
| Operating temperature | 5 | 50 | Accuracy guaranteed between 15 35 85 RH No condensation permitted | |
| Standard fitting | 1/4in.SWL (equivalent), One- For other fitting, please contact us. | |||
| Setting signal/Mass flow control | 0.25 5 VDC 10-turn potentiometer | |||
| Output signal | 0 5 VDC | |||
| Flow rate setting / output display | 0 100 (*2) | |||
| Display switching (setting / output) | Toggle Switch | |||
| Output terminal | Setting signal/Output signal : 0 5 VDC | |||
| Input power | AC100-240 V | |||
*1. Mass flow controller is conform to 1000 series specification.
*2. Flow rate display setting changes is possible.
Dimension:
Ordering:
CUBE MFC 1005 4S2 1L N2
| Series | Fitting | Full scale (*1) |
| 1005 10 SCCM 5 SLM | 4S2 1/4in.SWL(equivalent) | 50 50 SCCM |
| 1020 10 20 SLM | KQ2 One-touch fittings | 5L 5 SLM |
| 1030 30 SLM |
Gas Type(*2) N2 Air O2 H2 He CO2 etc. |
|
| 1050 50 SLM | ||
| 1100 100 SLM | ||
*1. At FCON, flow rates (SCCM, SLM) are converted to values at 0 , 101.3kPa abs (1atm) for calibration.
Please specify separately if you wish to calibrate at 20 or 25 .
*2. Gas type is an example; please contact us for other gases.
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